Title: Spiral Scanning Method for Atomic Force Microscopy
Authors: Hung, Shao-Kang
機械工程學系
Department of Mechanical Engineering
Keywords: Atomic Force Microscopy;Trajectory Planning;Spiral Scanning Method
Issue Date: 1-Jul-2010
Abstract: A spiral scanning method is proposed for atomic force microscopy with thoroughgoing analysis and implementation. Comparing with the traditional line-by-line scanning method, the spiral scanning method demonstrates higher imaging speed, minor image distortion, and lower acceleration, which can damage the piezoelectric scanner. Employing the spiral scanning method to replace the line-by-line scanning method, the experiment shows that the time to complete an imaging cycle can be reduced from 800 s to 314 s without sacrificing the image resolution.
URI: http://dx.doi.org/10.1166/jnn.2010.2353
http://hdl.handle.net/11536/8678
ISSN: 1533-4880
DOI: 10.1166/jnn.2010.2353
Journal: JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume: 10
Issue: 7
Begin Page: 4511
End Page: 4516
Appears in Collections:Conferences Paper