以有機化學汽相沉積法研製銻砷化銦/銻化鎵紅外光檢測器

Title:	以有機化學汽相沉積法研製銻砷化銦/銻化鎵紅外光檢測器 The Fabrication of InAsSb/GaSb Superlattice Infrared Photodetector by MOCVD
Authors:	張守進 CHANG SHOOU-JINN 交通大學電子工程系
Keywords:	有機化學氣相沈積法;紅外線;光偵測器;MOCVD;Infrared;Photodetector
Issue Date:	2000
Gov't Doc #:	NSC89-2215-E009-013
URI:	http://hdl.handle.net/11536/89089 https://www.grb.gov.tw/search/planDetail?id=542209&docId=99612
Appears in Collections:	Research Plans