| Title: | 運用掃描式探針顯微鏡研製與分析矽奈米電子元件(III) Fabrication and Characterization of Silicon Nanoelectronic Devices with Scanning Probe Microscope(III) |
| Authors: | 許鉦宗 SHEU JENG TZONG 國立交通大學奈米科技研究所 |
| Issue Date: | 2005 |
| Gov't Doc #: | NSC94-2215-E009-083 |
| URI: | http://hdl.handle.net/11536/90203 https://www.grb.gov.tw/search/planDetail?id=1144752&docId=219643 |
| Appears in Collections: | Research Plans |
- 運用掃描式探針顯微鏡研製與分析矽奈米電子元件(II) / 許鉦宗;SHEU JENG TZONG
- Single-crystal silicon nanostructure fabrication by scanning probe lithography and anisotropic wet etching / Chang, KM;You, KS;Wu, CH;Sheu, JT
- Single-electron transistor structures based on silicon-on-insulator silicon nanowire fabrication by scanning probe lithography and wet etching / Sheu, JT;You, KS;Wu, CH;Chang, KM
- Special issue on nanoelectronics and nanoscale processing / Sheu, B;Wu, PCY;Sze, SM
- 矽質奈米級電子元件的研究 / 林建宏;Jian-Hong Lin;張國明;Kow-Ming Chang
- Characterization of prototype silicon pitch artifacts fabricated by scanning probe lithography and anisotropic wet etching / Chien, FSS;Hsieh, WF;Gwo, S;Jun, J;Silver, RM
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