ALD在Damascene銅製程應用之研究(III)

Title:	ALD在Damascene銅製程應用之研究(III) The Application of ALD on Damascene Cu Metallization (III)
Authors:	陳智 Chen Chih 交通大學材料科學與工程系
Issue Date:	2005
Gov't Doc #:	NSC94-2623-7009-007-AT
URI:	http://hdl.handle.net/11536/90707 https://www.grb.gov.tw/search/planDetail?id=1064793&docId=202559
Appears in Collections:	Research Plans

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