ALD 在 Damascene 銅製程應用之研究(II)

Title:	ALD 在 Damascene 銅製程應用之研究(II) The Application of ALD on Damascene Cu Metallization(II)
Authors:	陳智 Chen Chih 交通大學材料科學與工程系
Issue Date:	2004
Gov't Doc #:	NSC93-2623-7009-003
URI:	http://hdl.handle.net/11536/90888 https://www.grb.gov.tw/search/planDetail?id=911995&docId=172348
Appears in Collections:	Research Plans

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