利用金屬壓印技術製作低溫複晶矽薄膜電晶體及擇區奈米碳管(I)

Title:	利用金屬壓印技術製作低溫複晶矽薄膜電晶體及擇區奈米碳管(I) The Fabrication of Low Temperature Poly-Si TFT and Selective Area Carbon Nanotubes by Metal Imprint (I)
Authors:	吳耀銓 YEWCHUNG SERMONWU 國立交通大學材料科學與工程學系
Issue Date:	2003
Gov't Doc #:	NSC92-2216-E009-024
URI:	http://hdl.handle.net/11536/92037 https://www.grb.gov.tw/search/planDetail?id=874271&docId=167553
Appears in Collections:	Research Plans

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