銅與低介電材料介電層之系統整合及可靠度提升研究(I)

Full metadata record

DC Field	Value	Language
dc.contributor.author	邱碧秀	en_US
dc.contributor.author	CHIOU BI-SHIOU	en_US
dc.date.accessioned	2014-12-13T10:34:31Z	-
dc.date.available	2014-12-13T10:34:31Z	-
dc.date.issued	2002	en_US
dc.identifier.govdoc	NSC91-2216-E009-023	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/92794	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=785501&docId=151054	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.title	銅與低介電材料介電層之系統整合及可靠度提升研究(I)	zh_TW
dc.title	The Reliability Enhancement for the Integrated System of Copper and Low K Dielectric Interconnect (I)	en_US
dc.type	Plan	en_US
dc.contributor.department	交通大學電子工程系	zh_TW
Appears in Collections:	Research Plans

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