| Title: | ALD在Damascene銅製程應用之研究 |
| Authors: | 陳智 Chen Chih 交通大學材料科學與工程系 |
| Issue Date: | 2002 |
| Gov't Doc #: | NSC91-AT-7009-001 |
| URI: | http://hdl.handle.net/11536/92796 https://www.grb.gov.tw/search/planDetail?id=790590&docId=151837 |
| Appears in Collections: | Research Plans |
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