快速熱程序設備動態模式建立參數判別及溫度控制(III)

Full metadata record

DC Field	Value	Language
dc.contributor.author	林清安	en_US
dc.contributor.author	LIN CHING-AN	en_US
dc.date.accessioned	2014-12-13T10:37:14Z	-
dc.date.available	2014-12-13T10:37:14Z	-
dc.date.issued	1999	en_US
dc.identifier.govdoc	NSC88-2218-E009-005	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/94475	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=430078&docId=77027	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.subject	快速熱處理	zh_TW
dc.subject	溫度控制	zh_TW
dc.subject	參數識別	zh_TW
dc.subject	晶圓表面	zh_TW
dc.subject	線性矩陣不等式	zh_TW
dc.subject	熱源	zh_TW
dc.subject	Rapid thermal processing (RTP)	en_US
dc.subject	Temperature control	en_US
dc.subject	Parameter identification	en_US
dc.subject	Wafer surface	en_US
dc.subject	Linear matrix inequality	en_US
dc.subject	Heat source	en_US
dc.title	快速熱程序設備動態模式建立參數判別及溫度控制(III)	zh_TW
dc.title	Thermal Process Modelling Parameter Identification and Temperature Control in Rapid Thermal Processing Equipments(III)	en_US
dc.type	Plan	en_US
dc.contributor.department	交通大學電機與控制工程系	zh_TW
Appears in Collections:	Research Plans

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