Title: | 低溫液相沈積二氧化矽薄膜之研究發展 Investigations and Developments Room-Temperature Liquid-Phase Deposition of SiO/sub 2/ Film |
Authors: | 葉清發 國立交通大學電子工程研究所 |
Issue Date: | 1995 |
Gov't Doc #: | NSC84-2215-E009-054 |
URI: | http://hdl.handle.net/11536/96391 https://www.grb.gov.tw/search/planDetail?id=172143&docId=29236 |
Appears in Collections: | Research Plans |