Title: 低寄生旋轉二維平面奈米定位器之設計
Design of Two-Dimension Planar Nano-Positioner with Low Parasitical Rotation
Authors: 洪紹剛
Hung Shao-Kang
國立交通大學機械工程學系(所)
Issue Date: 2014
Gov't Doc #: MOST103-2221-E009-019
URI: http://hdl.handle.net/11536/99828
https://www.grb.gov.tw/search/planDetail?id=8312693&docId=439000
Appears in Collections:Research Plans