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Browsing by Author Lai, WK

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Showing results 1 to 9 of 9
Issue DateTitleAuthor(s)
1-Oct-1998Effects of CoSi2 on p(+) polysilicon gates fabricated by BF2+ implantation into CoSi amorphous Si bilayersCheng, HC; Lai, WK; Liu, HW; Juang, MH; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1-Jul-1999Effects of rapid thermal annealing on cobalt silicided p(+) poly-Si gates fabricated by BF2+ implantation into bilayered CoSi/a-Si filmsLai, WK; Liu, HW; Juang, MH; Cheng, HC; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1-Nov-1997Effects of RCA clean-up procedures on the formation of roughened poly-Si electrodes for high-density DRAMs' capacitorsLiu, HW; Lai, WK; Yu, SY; Huang, SC; Cheng, HC; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1-Nov-1997Effects of RCA clean-up procedures on the formation of roughened poly-Si electrodes for high-density DRAMs' capacitorsLiu, HW; Lai, WK; Yu, SY; Huang, SC; Cheng, HC; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1-Feb-1996Investigation of the dosage effect on the activation of arsenic- and boron-implanted low-pressure chemical vapor deposition (LPCVD) amorphous-silicon filmsWang, FS; Tsai, MJ; Lai, WK; Cheng, HC; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1-Jul-1998A novel process to form cobalt silicided p(+) poly-Si gates by BF2+ implantation into bilayered CoSi/a-Si films and subsequent annealLai, WK; Liu, HW; Juang, MH; Chen, NC; Cheng, HC; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1-Sep-1997The oxidation mechanism of low-pressure dry oxidation of nitrides for memory devicesLiu, HW; Su, HP; Lai, WK; Cheng, HC; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1-Sep-1997The oxidation mechanism of low-pressure dry oxidation of nitrides for memory devicesLiu, HW; Su, HP; Lai, WK; Cheng, HC; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1-Oct-1999Suppression of boron penetration for p(+) stacked poly-Si gates by using inductively coupled N-2 plasma treatmentCheng, HC; Lai, WK; Hwang, CC; Juang, MH; Chu, SC; Liu, TF; 材料科學與工程學系; 電子工程學系及電子研究所; Department of Materials Science and Engineering; Department of Electronics Engineering and Institute of Electronics
Showing results 1 to 9 of 9