Effects of thermal stabilities for the ultra thin chromium layers applied on (Ba,Sr)TiO3 thin films

Title:	Effects of thermal stabilities for the ultra thin chromium layers applied on (Ba,Sr)TiO3 thin films
Authors:	Kuo, MW Shye, DC Chiou, BS Chen, JS Cheng, HC 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics
Keywords:	BST (77.84.-s);thermal stability (68.60.Dv);dielectric property (77.55.+f)
Issue Date:	2004
Abstract:	This work reports the temperature-electric properties for the (Ba,Sr)TiO3(BST) thin film capacitor using the multi-film structure of BST/ultra-thin-chromium(Cr) layer/BST. The BST(200 nm)/Cr(1-3 nm)/BST(200 nm) multi-films reveal excellent properties in the thermal stabilities of dielectric property, low leakage current and less power dissipation.
URI:	http://hdl.handle.net/11536/27161 http://dx.doi.org/10.1080/10584580490459224
ISSN:	1058-4587
DOI:	10.1080/10584580490459224
Journal:	INTEGRATED FERROELECTRICS
Volume:	61
Begin Page:	183
End Page:	187
Appears in Collections:	Conferences Paper

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