Title: Preparation and characterization of new low-dielectric thin-film materials with fluorine.
Authors: Chuang, SH
Wan, CY
Chiu, HT
應用化學系
Department of Applied Chemistry
Issue Date: 1-Mar-2003
URI: http://hdl.handle.net/11536/28078
ISSN: 0065-7727
Journal: ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY
Volume: 225
Issue: 
Begin Page: U88
End Page: U88
Appears in Collections:Conferences Paper