Title: | Preparation and characterization of new low-dielectric thin-film materials with fluorine. |
Authors: | Chuang, SH Wan, CY Chiu, HT 應用化學系 Department of Applied Chemistry |
Issue Date: | 1-Mar-2003 |
URI: | http://hdl.handle.net/11536/28078 |
ISSN: | 0065-7727 |
Journal: | ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY |
Volume: | 225 |
Issue: | |
Begin Page: | U88 |
End Page: | U88 |
Appears in Collections: | Conferences Paper |