Preparation and characterization of new low-dielectric thin-film materials with fluorine.

Title:	Preparation and characterization of new low-dielectric thin-film materials with fluorine.
Authors:	Chuang, SH Wan, CY Chiu, HT 應用化學系 Department of Applied Chemistry
Issue Date:	1-Mar-2003
URI:	http://hdl.handle.net/11536/28078
ISSN:	0065-7727
Journal:	ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY
Volume:	225
Issue:
Begin Page:	U88
End Page:	U88
Appears in Collections:	Conferences Paper