MICROSTRUCTURE AND PROPERTIES OF MULTILAYER-DERIVED TUNGSTEN SILICIDE

标题:	MICROSTRUCTURE AND PROPERTIES OF MULTILAYER-DERIVED TUNGSTEN SILICIDE
作者:	CHIOU, BS RAU, HL CHANG, PH DUH, JG 电控工程研究所 Institute of Electrical and Control Engineering
公开日期:	1-七月-1987
URI:	http://dx.doi.org/10.1007/BF02653362 http://hdl.handle.net/11536/4634
ISSN:	0361-5235
DOI:	10.1007/BF02653362
期刊:	JOURNAL OF ELECTRONIC MATERIALS
Volume:	16
Issue:	4
起始页:	251
结束页:	255
显示于类别：	Articles

APA	CHIOU, B., RAU, H., CHANG, P., & DUH, J. (1987). MICROSTRUCTURE AND PROPERTIES OF MULTILAYER-DERIVED TUNGSTEN SILICIDE. WOS:A1987J352900005.
Bibtex	@article{CHIOU1987MICROSTRUCTURE, title={MICROSTRUCTURE AND PROPERTIES OF MULTILAYER-DERIVED TUNGSTEN SILICIDE}, author={CHIOU, BS and RAU, HL and CHANG, PH and DUH, JG}, journal={WOS:A1987J352900005}, year={1987}, url={http://140.113.37.243/handle/11536/4634?locale=zh_CN}, }