| 標題: | 以射頻磁控式濺鍍法製備鈦酸鋯鉛(PZT)薄膜 Preparation of PZT thin films by magnetron RF sputtering |
| 作者: | 朱聰明 Zhu, Cong Ming 林鵬 Lin, Peng 材料科學與工程學系 |
| 公開日期: | 1994 |
| URI: | http://140.113.39.130/cdrfb3/record/nctu/#NT832159012 http://hdl.handle.net/11536/59676 |
| Appears in Collections: | Thesis |
- Studies on ferroelectric properties of sol-gel derived Pb(Zr0.53Ti0.47)O-3 using Ba0.5Sr0.5RuO3 as the conductive electrodes / Wang, YK;Huang, CH;Tseng, TY;Linb, P
- Enhanced ferroelectric properties of Pb(Zr0.53Ti0.47)O-3 thin films on SrRuO3/Ru/SiO2/Si substrates / Wang, YK;Tseng, TY;Lin, P
- 螯合劑對Sol-Gel備製PZT薄膜的影響 / 莫德政;Mo, Dao-Zhang;陳三元;Chen, San-Yuan
- PZT壓電微致動器之製程與鐵電特性研究 / 李俊翰;Jun Han Li;陳三元;San-Yuan Chan
- 以反應性交流磁控濺鍍系統成長碳化鈦薄膜之研究 / 林文彬;Wen-Bin Lin;曾俊元;Tseung-Yuen Tseng
- Nanomechanical properties of lead zirconate titanate thin films by nanoindentation / Fang, TH;Jian, SR;Chuu, DS
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