300 mm 多腔製程設備之自動建模及最佳排程

Title:	300 mm 多腔製程設備之自動建模及最佳排程 Automatic Modeling and Optimal Scheduling of Cluster Tool for 300mm Wafers
Authors:	李安謙 LEE AN-CHEN 國立交通大學機械工程學系
Keywords:	自動建模;排程;晶圓製程;生產管制;Automatic modeling;Scheduling;Wafer process;Production control
Issue Date:	2001
Gov't Doc #:	NSC90-2212-E009-066
URI:	http://hdl.handle.net/11536/93683 https://www.grb.gov.tw/search/planDetail?id=645542&docId=121289
Appears in Collections:	Research Plans

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