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Issue DateTitleAuthor(s)
13-Jan-1997Deposition of polycrystalline beta-SiC films on Si substrates at room temperatureCheng, KL; Cheng, HC; Lee, WH; Lee, CP; Liu, CC; Yew, TR; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1996Diagnostic techniques for polycrystalline thin film growthCheng, KL; Cheng, HC; Yew, TR; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1-Dec-1995Growth of SiC films on Si(100) by electron cyclotron resonance chemical vapor deposition using SiH4/CH4/H-2Liu, CC; Lee, CP; Cheng, KL; Cheng, HC; Yew, TR; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1997Low temperature deposited highly-conductive N-type SiC thin filmsCheng, KL; Cheng, HC; Lee, WH; Lee, C; Yew, TR; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1996Polycrystalline beta-SiC film growth on Si by ECR-CVD at 178-500 degrees CCheng, KL; Liu, CC; Fu, CM; Cheng, HC; Lee, C; Yew, TR; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
Showing results 1 to 5 of 5