瀏覽 的方式： 作者 Cheng, KL
顯示 1 到 5 筆資料，總共 5 筆
| 公開日期 | 標題 | 作者 |
| 13-一月-1997 | Deposition of polycrystalline beta-SiC films on Si substrates at room temperature | Cheng, KL; Cheng, HC; Lee, WH; Lee, CP; Liu, CC; Yew, TR; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics |
| 1996 | Diagnostic techniques for polycrystalline thin film growth | Cheng, KL; Cheng, HC; Yew, TR; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics |
| 1-十二月-1995 | Growth of SiC films on Si(100) by electron cyclotron resonance chemical vapor deposition using SiH4/CH4/H-2 | Liu, CC; Lee, CP; Cheng, KL; Cheng, HC; Yew, TR; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics |
| 1997 | Low temperature deposited highly-conductive N-type SiC thin films | Cheng, KL; Cheng, HC; Lee, WH; Lee, C; Yew, TR; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics |
| 1996 | Polycrystalline beta-SiC film growth on Si by ECR-CVD at 178-500 degrees C | Cheng, KL; Liu, CC; Fu, CM; Cheng, HC; Lee, C; Yew, TR; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics |
