快速熱程序設備動態模式建立參數判別及溫度控制(III)

Title:	快速熱程序設備動態模式建立參數判別及溫度控制(III) Thermal Process Modelling Parameter Identification and Temperature Control in Rapid Thermal Processing Equipments(III)
Authors:	林清安 LIN CHING-AN 交通大學電機與控制工程系
Keywords:	快速熱處理;溫度控制;參數識別;晶圓表面;線性矩陣不等式;熱源;Rapid thermal processing (RTP);Temperature control;Parameter identification;Wafer surface;Linear matrix inequality;Heat source
Issue Date:	1999
Gov't Doc #:	NSC88-2218-E009-005
URI:	http://hdl.handle.net/11536/94475 https://www.grb.gov.tw/search/planDetail?id=430078&docId=77027
Appears in Collections:	Research Plans

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